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Plasma processing
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#	Item
161	____________________________________________________________________ DUAL-USE LIST - CATEGORY 2 – MATERIALS PROCESSING ____________________________________________________________________ ____________________________ Add to Reading List Source URL: www.wassenaar.org Language: English - Date: 2015-02-12 11:01:27 Manufacturing Matter Semiconductor device fabrication Superhard materials Plasma processing Superalloy Chemical vapor deposition Plating Sputter deposition Chemistry Thin film deposition Coatings
162	MUEGGE_Poster_MEMS-Stripping-Technology-Tool_Rev00 Add to Reading List Source URL: www.muegge.de Language: English - Date: 2015-01-07 04:55:26 Technology Physics Plasma processing Etching Plasma etching Microelectromechanical systems Dry etching Plasma Microwave Semiconductor device fabrication Materials science Microtechnology
163	pRODUCTS & aPPLICATIONS e Ion Beam Process Systems Plasma Process Systems Add to Reading List Source URL: www.meyerburger.com Language: English - Date: 2013-10-29 06:56:41 Technology Physics Plasma processing Microtechnology Plasma physics Microelectromechanical systems Thin film Ion beam deposition Sputter deposition Semiconductor device fabrication Thin film deposition Materials science
164	DEPx PECVD system for high speed coating processes Low cost manufacturing solution Lowest cost of ownership High uptime Easy to operate and maintain Add to Reading List Source URL: www.meyerburger.com Language: English - Date: 2014-01-13 05:05:19 Manufacturing Ultraviolet radiation Thin film deposition Semiconductor device fabrication Plasma processing Thin film Plasma-enhanced chemical vapor deposition Plasma Nanoparticle Materials science Physics Thin films
165	Hindawi Publishing Corporation Journal of Nanomaterials Volume 2013, Article ID[removed], 6 pages http://dx.doi.org[removed][removed]Review Article Add to Reading List Source URL: downloads.hindawi.com Language: English - Date: 2014-08-28 12:52:18 Physics Microtechnology Plasma processing Spectroscopy Nanotechnology Etching Dry etching Reactive-ion etching Polymer Semiconductor device fabrication Chemistry Materials science
166	Molecular Devices: A Potential Replacement for Semiconductors Anthony Moeller NIST Semiconductor Electronics Division July 27, 2004 Add to Reading List Source URL: spsnational.org Language: English - Date: 2006-11-14 11:17:28 Technology Plasma processing Etching Reactive-ion etching Wafer Photolithography Chemical vapor deposition Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
167	Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source G. I. Isai, A. Y. Kovalgin, J. Holleman, P. H. Woerlee, H. Wallinga MESA+, University of Twente, The Ne Add to Reading List Source URL: doc.utwente.nl Language: English - Date: 2011-08-28 10:01:32 Materials science Thin film deposition Plasma processing Plasma Electron cyclotron resonance Chemical vapor deposition Thin film Capacitor Nanoparticle Physics Chemistry Semiconductor device fabrication
168	618 IEEE TRANSACTIONS ON NANOTECHNOLOGY, VOL. 9, NO. 5, SEPTEMBER 2010 Vapor-Phase Facile Coatings of Nanotextured Organic Biocompatible Films on Add to Reading List Source URL: www.uta.edu Language: English - Date: 2010-09-08 21:22:22 Nanotechnology Thin film deposition Plasma processing Self-assembled monolayer Thin film Coating Adsorption Sputter deposition Protein adsorption Chemistry Materials science Thin films
169	Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides Add to Reading List Source URL: liu.diva-portal.org Language: English - Date: 2012-06-28 02:10:16 Semiconductor device fabrication Physics Chemistry Plasma processing Manufacturing Sputter deposition Sputtering Thin film Hysteresis Materials science Thin film deposition Coatings
170	Optical properties of oxide thin films deposited by reactive HiPIMS Add to Reading List Source URL: liu.diva-portal.org Language: English - Date: 2011-08-11 02:54:21 Manufacturing Coatings Physics Semiconductor device fabrication Plasma processing Sputter deposition Sputtering Thin film Titanium dioxide Chemistry Thin film deposition Materials science

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